Study on Patternable Hybrid Sol-Gel Glass

摘要

The hybrid sol-gel materials have been extensively studied and widely used in the fabrication of optical devices due to their attractive properties. In this work, the synthesis of the UV sensitive organic-inorganic SiO_2/TiO_2 sol-gel glass is presented. The effect of the fabrication parameters such as doping concentration, bake temperature and UV light exposure time on the film characteristics (thickness and refractive index) are studied. A simple way of patterning the material by UV light radiation is also introduced. These demonstrate the material possesses high potential application for the micro-optics device fabrication.