Laser micromachining for manufacturing MEMS devices

机译：用于制造MEMS器件的激光微加工

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Applications of laser micromachining to the manufacture and prototyping of MEMS and MOEMS devices are presented. Examples of microturbines, biofactory on a chip, microfluidic components and microoptical elements manufactured by laser micromachining are described.

机译：介绍了激光微加工在MEMS和MOEMS器件的制造和原型制作中的应用。描述了微涡轮机，芯片上的生物工厂，通过激光微加工制造的微流体部件和微光学元件的实例。

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来源
《Conference on MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication Oct 22-23, 2001, San Francisco, USA》|2001年|p.53-59|共7页
会议地点 San Francisco CA(US)
作者
Malcolm Gower;
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作者单位

Exitech Ltd, Hanborough Park, Long Hanborough, Oxford OX8 8LH, England;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
laser micromachining; MEMS; MOEMS; biofactory-on-a-chip; microoptics;

机译：激光微加工MEMS; MOEMS；芯片生物工厂；微光学;

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1. Thermal and Manufacturing Design Considerations for Silicon-Based Embedded MicroChannel Three-Dimensional-Manifold Coolers (EMMC)-Part 3: Addressing Challenges in Laser Micromachining-Based Manufacturing of Three-Dimensional-Manifolded Microcooler Devices [J] . Sougata Hazra, Ki Wook Jung, Madhusudan lyengar, Journal of Electronic Packaging . 2020,第3期

机译：基于硅的嵌入式微通道三维歧管冷却器（EMMC）的热和制造设计考虑因素 - 第3条：解决基于激光微机械制造的三维型微型电压器设备的挑战
2. Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication [J] . Ben Pecholt, Monica Vendan, Yuanyuan Dong, The International Journal of Advanced Manufacturing Technology . 2008,第3a4期

机译：用于MEMS器件制造的3C-SiC薄膜的超快激光微加工
3. Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication [J] . Ben Pecholt, Monica Vendan, Yuanyuan Dong, The International Journal of Advanced Manufacturing Technology . 2008,第3a4期

机译：用于MEMS器件制造的3C-SiC薄膜的超快激光微加工
4. HIGH PRECISION FEMTOSECOND LASER MICROMACHINING FOR RAPID MANUFACTURE OF MEMS DEVICES [C] . A. Bulusu, S. P. Joshi, P. S. Shiakolas ASME(American Society of Mechanical Engineers) International Mechanical Engineering Congress: Micro-Electro-Mechanical Systems(MEMS); 20031115-20031121; Washington,DC; US . 2003

机译：MEMS设备快速制造的高精度飞秒激光显微加工
5. Laser Micromachining and Its Applications in Manufacturing of Micro Medical Devices. [D] . Ren, Deyao. 2009

机译：激光微加工及其在微型医疗设备制造中的应用。
6. Microfluidic and Micromachined/MEMS Devices for Separation, Discrimination and Detection of Airborne Particles for Pollution Monitoring [O] . Daniel Puiu Poenar 2015

机译：微流体和微加工/ MEMS装置，用于分离，鉴别和检测空气中的颗粒物，以进行污染监测
7. Electrochemically Assisted Maskless Selective Removal of Metal Layers for Three-Dimensional Micromachined SOI RF MEMS Transmission Lines and Devices [O] . Sterner, Mikael, Roxhed, Niclas, Stemme, Göran, 2011

机译：三维微加工SOI RF MEMS传输线和器件的金属层的电化学辅助无掩模选择性去除

Laser micromachining for manufacturing MEMS devices

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