Development of sub-micrometer resolution x-ray CT system at SPring-8

摘要

A high spatial resolution x-ray CT system was developed at SPring-8. The experiments were performed at the "in-vacuum type" undulator beamline BL47XU. A Si (111) double crystal monochromator is cooled with liquid nitrogen. A high precision rotation stage was used for sample rotation stage. Transmitted images were measured with an image detector. As the results of performance tests, it is considered that the spatial resolution of at least lμm was achieved with this system. The three-dimensional textures of eutectic alloy and a fossil of diatom were observed with this system.