Fundamentals of Silicon Photonics: Design, Fabrication, and Testing A Course for Senior Optical Engineering Majors

摘要

This is an introductory course in silicon photonics for senior and graduate students. Topics covered in this course include: basic properties of silicon waveguides; the essentials of SOI waveguide fabrication; dispersion and propagation loss in Si waveguides; analysis and design of various passive silicon devices; modeling and characterization of silicon modulators; integrated photonic circuit; and layouts for E-beam lithography. This course also includes a laboratory to enhance student's learning. Students fabricate a thermo-optic MZI modulator in the cleanroom and then characterize its performance. We will discuss experimental work by student groups and comment on student's learning in this class.