Hole Machining of Glass by Micro Abrasive Suspension Jets

摘要

Abrasive Suspension Jets (ASJ) is a new micro processing technique developed for micro processing of hard and brittle materials based on the traditional Abrasive Water Jet (AWJ). Based on drilling experiments of glass using MASJ technology, the dependence of material removal, the depth and the diameter of the machined holes on the process parameters, such as working pressure, processing time, standoff distance, incidence angle and concentration of abrasives were investigated. Experimental results show that the material removal is approximately proportional to working pressure, processing time and concentration of abrasives, except the standoff distance. It is founded that the processing time is the most remarkable influence factor on the material removal and the depth of the holes. But the working pressure doesn't show obvious effects to the material removal and the depth of hole with lower pressure in MASJ. The increase of standoff distance will decrease the material removal and depth of hole, and the concentration of abrasives can improve a few of drilling ability. Further, it is founded that longer processing time and smaller standoff distance will achieve higher MASJ drilling efficiency and better quality of hole, with 90 degree jet incidence angle.