School of Engineering, The University of Queensland, Brisbane, Australia;
School of Engineering, The University of Queensland, Brisbane, Australia;
School of Engineering, The University of Queensland, Brisbane, Australia;
School of Engineering, The University of Queensland, Brisbane, Australia Centre for Centre for Microscopy and Microanalysis, The University of Queensland, Australia;
Faculty of Engineering, Ibaraki University, Hitachi-Shi, Japan;
silicon; removal mechanism; subsurface damage; nanoscratch; nanogrinding;
机译:纳米研磨产生的单晶硅的表面结构
机译:使用多孔硅作为应力产生纳米材料的单晶硅薄膜应变
机译:纳米型硅硅硅晶体硅晶体诱导地下改性和裂纹形成的数值模拟与验证
机译:纳米格林产生的单晶硅底表面结构
机译:激光辅助微加工,用于埋入地下的硅结构。
机译:微加工法制备单晶硅方柱结构疏水性的研究
机译:单晶硅微铣削中的表面和亚表面表征