首页> 外文会议>Advanced Thermal Processing of Semiconductors, 2009. RTP '09 >Issues in modeling, supervision, and fault detection for automated RTP systems
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Issues in modeling, supervision, and fault detection for automated RTP systems

机译:自动化RTP系统的建模,监督和故障检测中的问题

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Event detectability is the corner stone of constructing reliable diagnosers for Petri net (PN) models. In some PN models, the transition firing sequences are not detectable based on their outputs and structural information only. This paper introduces a novel diagnoser to overcome such problems. The developed diagnoser depends not only on the output and the structural information of the PN models, but also on its associated marking vector. The main advantage of the proposed diagnoser is to evaluate the faulty states without checking event detectability and coverability trees of the discrete event systems. Issues for Rapid Thermal Processing (RTP) modeling and supervision are also addressed in this paper. Early fault detection will minimize cost and processing time of the RTP systems, accordingly, this paper also develops a unified PN-based frame work for fault detection and isolation in these systems.
机译:事件可检测性是构建Petri网(PN)模型的可靠诊断程序的基石。在某些PN模型中,仅根据其输出和结构信息无法检测到过渡触发序列。本文介绍了一种新颖的诊断程序来克服此类问题。开发的诊断程序不仅取决于PN模型的输出和结构信息,还取决于其相关的标记向量。提出的诊断程序的主要优点是无需检查离散事件系统的事件可检测性和可覆盖性树,即可评估故障状态。本文还讨论了快速热处理(RTP)建模和监督的问题。早期的故障检测将最大限度地减少RTP系统的成本和处理时间,因此,本文还开发了基于PN的统一框架,用于这些系统中的故障检测和隔离。

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