The design of pulsed power supply by modulated amplitude for driving the electrostatic probe system

摘要

Based on the principles of Langmuir probe for plasma diagnosis, we analyzed the working principle of single Langmuir probe. We connected the scan power supply to the probe, when the probe comes to the electronic saturated current. Since the probe current is very big, then it will lead to serious probe fever and further its resistance value will increase, finally this will result in the measured parameters of the plasma falsely. Considering the above reasons, in this paper we design a pulsed power supply by modulated amplitude for driving the electrostatic probe system. Experimental tests showed that the power supply can effectively reduce the electron saturation current disturbance to the probe.