Impact of crystalline structure on electrical property of NiGe/Ge contact

摘要

We can control the crystalline structure of NiGe layer on Ge(110) by controlling the deposition method, surface cleaning, and annealing temperature. We also investigated the impact of the interface crystalline structures on the electrical properties of NiGe/Ge(110) contacts. We found that thermal cleaning of Ge surface improves on the interfacial structure of the epitaxial NiGe/Ge(110) contact, that leads to lowering SBH.