Add-on Sensor using object messaging protocol E54.9 Modbus/TCP

摘要

It is evident that more information about the process conditions are necessary because the control data like rf-power, pressure, etc. are insufficient to meet the demands on APC and e-diagnostic including Enhanced Equipment Quality Assurance (EEQA). Therefore additional sensors for process monitoring have to be included into the environment of the equipment. The integration of the data of add-on sensors is the main hint of using new smart and intelligent sensors. Reasons are the lack of standards and the absence of interfaces of addon sensors in the equipment. Manufacturers spend a lot of effort to overcomes these obstacles. The implementation of a standardized sensor interface would solve this problem.