首页> 外国专利> APPARATUS FOR PREPARING LARGE-SIZE SINGLE CRYSTAL

APPARATUS FOR PREPARING LARGE-SIZE SINGLE CRYSTAL

机译:大尺寸单晶制备装置

摘要

Disclosed is an apparatus for preparing a large-size single crystal, which relates to the field of semiconductor material preparation, and more particularly, to an apparatus for preparing a large-size single crystal from a plurality of small-size single crystals by connecting them in solid states. The apparatus includes a hydrocooling furnace, a solid connection chamber hermetically disposed in the hydrocooling furnace, and combined fixtures provided in the solid connection chamber, wherein a plurality of crystal pieces are fixed by the combined fixtures, a top column or a stress block is used for pressing the crystal piece through the combined fixtures, a heating wire surrounding the solid connection chamber is provided in the hydrocooling furnace, a vacuum tube is communicated with the solid connection chamber, and a thermocouple is disposed close to the combined fixtures. The present disclosure is advantageous in that: 1, single crystal pieces with a small size can be connected and prepared into a single crystal with a larger size, 2, in the preparation process, the problems in the conventional single crystal growth process, such as twinning and polycrystallization, can be excluded from consideration, 3, the equipment is simple, and 4, preparation of single crystals with any size is possible theoretically.
机译:本发明公开了一种制备大尺寸单晶的装置,涉及半导体材料制备领域,更具体地说,涉及一种通过固态连接多个小尺寸单晶来从多个小尺寸单晶制备大尺寸单晶的装置。该装置包括一个水冷炉、一个密封地布置在该水冷炉中的固态连接室以及设置在该固态连接室中的组合夹具,其中多个晶体片由组合夹具固定,顶柱或应力块用于通过组合夹具按压晶体片,所述水冷炉内设有环绕所述固连室的加热丝,真空管与所述固连室连通,热电偶设置在所述组合夹具附近。本发明的优点在于:1、可以将较小尺寸的单晶片连接并制备成较大尺寸的单晶;2、在制备过程中,可以不考虑传统单晶生长过程中的孪晶和多晶等问题;3、设备简单;4、,从理论上讲,制备任何尺寸的单晶都是可能的。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号