首页> 外国专利> RESONANT-BASED PHOTONIC INTENSITY MODULATORS INTEGRATED WITH FULLY ETCHED THIN-FILM LITHIUM NIOBATE WAVEGUIDES

RESONANT-BASED PHOTONIC INTENSITY MODULATORS INTEGRATED WITH FULLY ETCHED THIN-FILM LITHIUM NIOBATE WAVEGUIDES

机译:基于谐振的光子强度调节剂与完全蚀刻的薄膜铌酸锂波导集成

摘要

An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.
机译:诸如光学调制器的装置包括掩埋氧化物层设置在基板上。 微导谐振器和光波导设置在掩埋氧化物层和粘合的半导体层内。 光波导光学耦合到微管谐振器,并将第一光波输入到微管谐振器中。 氧化物层沉积在光波导和微管谐振器的顶部。 一组电极设置在微耦合器附近,并且响应于电信号,该组电极将第一光波调制到微址谐振器内的横向磁极化的调制光波中,并将调制的光波输出到 光波导。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号