Cryogenic cooled vacuum chamber radiation shield for cryogenic and ultrahigh vacuum (XHV) states

摘要

Methods, systems and devices for ultrahigh vacuum or ultrahigh vacuum are described.Such systemsVacuum chamber andTarget in vacuum chamberArranged within the vacuum chamber's internal vacuum spaceWith two or more overlapping radiation shields that surround at least part of the targetFirst and second cooling element units thermally coupled to first and second radiation shields of two or more overlapping radiation shields andThermally coupled to the targetComprising a third cooling element unit thermally insulated from both the first radiation shield and the second radiation shield;The first unit isIs configured to reduce the temperature of the first radiation shield to less than at leastThe second unitThe second radiation shield is configured to reduce the temperature of the radiation shield to belowThird cooling element unitThe target temperature is reduced to less than 4 K.