Device diagnostic device, device diagnostic method, plasma processing device and semiconductor device manufacturing system

摘要

In the plasma processing apparatus, the occurrence of unplanned maintenance that may occur is predicted in advance, and the necessary maintenance work and when the work should be incorporated into the planned maintenance can be immediately judged from the viewpoint of preferential maintenance cost. A deterioration degree estimating unit for estimating the degree of deterioration of the plasma processing apparatus by receiving the output of a sensor equipped with the apparatus diagnostic device in the plasma processing apparatus, and the original maintenance plan based on the degree of deterioration estimated by the deterioration degree estimating unit A maintenance work occurrence probability estimating unit that calculates the probability that an unplanned maintenance operation will occur, which is not included, a performance maintenance cost calculation unit that calculates the performance maintenance cost, and an unplanned maintenance operation estimated by the maintenance work occurrence probability estimation unit occur A maintenance cost calculation unit is provided at the time of incorporation of a plan to output a revised maintenance plan corrected from the original maintenance plan incorporating maintenance work other than the planned based on the actual maintenance cost of the plasma processing device calculated by the probability and performance maintenance cost calculation unit. did.