METAL OXIDE BASED SENSOR ARRAY FOR THE DETECTION OF CHEMICAL WARFARE AGENTS (CWA) AND TOXIC INDUSTRIAL CHEMICALS (TICS)

摘要

Metal oxide based chemical detecting sensor array (6) is developed with the present invention that detects Chemical Warfare Agents (CWA) and Toxic Industrial Chemicals (TICs), which are effective in chemical biological radiological nuclear attacks in military and social fields, is suitable for mobile use and in-vehicle integrated use, is associated with at least one electronic component (7) and is fitted onto an electronic PCB board (8) together with the electronic component (7). Developed sensor array (6) mainly comprises the following; thermally oxidized substrate (1); at least one micro heater electrode (2) that is coated with an insulating layer (3) connected with the substrate (1); at least one interdigital electrode (4) that is located on the micro heater electrode (2) coated with an insulating layer (3) and a detecting layer (5) that coats the external surface of the interdigital electrode (4) and contains at least one metal oxide.