Gas distribution plate with high aspect ratio holes and high hole density

摘要

A gas distribution plate for a showerhead assembly of a processing chamber may include at least a first plate and a second plate. The first plate may include a first plurality of holes each having a diameter of at least about 100 um. The second plate may include a second plurality of holes each having a diameter of at least about 100 um. Additionally, each of the first plurality of holes is aligned with a respective hole of the second plurality of holes to form a plurality of interconnected holes. Each of the interconnected holes is isolated from a respective other interconnected hole.