Apparatus for determining focal position of laser beam within laser processing system, laser processing system equipped with the device, and method for determining focal position of laser beam within laser processing system

摘要

The present invention relates to an apparatus (200) for determining a focal position (F) of a laser beam (10) within a laser processing system (100). The apparatus (200) has an optical element (210) designed to separate the first subbeam (12) of the laser beam (10) by reflecting a portion of the laser beam (10), and a first subbeam (1). The laser beam (10) is based on the actual diameter measurement value, the laser beam power, and the calibration data of the spatial decomposition sensor (230) to which the 12) is guided and the first sub-beam (12) corresponding to the spatial decomposition sensor (230). It comprises an evaluation unit (240), which is designed to determine the focal position (F).