Manufacturing system of electron microscope observation sample, manufacturing method of electron microscopic observation sample, plasma processing apparatus used, and sputtering apparatus, and tape conveying mechanism

摘要

Problem to be solved: to provide a sample preparation system and a method for electron microscopic observation capable of continuous electron microscopic observation of specimen sections by a simple method using a simple apparatus.A sample preparation system for electron microscopic observation of a specimen is placed on a tapeA plasma processing device which continuously moves the resin tape in the plasma irradiation region and continuously irradiates plasmaAt least one of the sputter devices in which the resin tape is run in the sputtering region to continuously sputter and electrify the resin tapeOn the treated surface of the resin tape treated with the plasma processing apparatus or sputtering apparatusThe apparatus further comprises a recovery apparatus for sequentially collecting sections of the sample cut continuously.