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TEST FILM FOR DETECTING SURFACE PARTICLES IN CLEAN ROOM

机译:用于检测洁净室中表面粒子的试验薄膜

摘要

The present invention relates to a test film for detecting surface particles in a clean room in order to prevent inferior products by measuring the contamination level of the clean room using the surface particles. The present invention provides a test film for detecting surface particles in a cleanroom, the test film comprising a substrate which has a predetermined thickness and is formed of a transparent synthetic resin material; a first adhesive layer which is formed at one side of the substrate and collects the surface particles; a release film which is adhered to the first adhesive layer and is separated from the first adhesive layer when the surface particles are collected; a second adhesive layer which is formed at the other side of the substrate; and a protective film which is adhered to the second adhesive layer so as to protect the substrate and has gradations indicated thereon. According to the present invention, there is an effect in that it is possible to easily and quickly check whether or not a clean room is contaminated by collecting, on the adhesive layer-applied surface of a substrate to which an adhesive is applied, surface particles adhered to an object to be measured, and then measuring the number, size, distribution, etc. of the surface particles with the naked eye or using instruments such as a light, a magnifier, a microscope, or the like.
机译:本发明涉及一种用于检测洁净室中表面颗粒的测试膜,以便通过使用表面颗粒测量洁净室的污染水平来防止劣质产品。本发明提供了一种用于检测洁净室中表面颗粒的测试膜,所述测试膜包括具有预定厚度并且由透明合成树脂材料形成的基板;第一粘合剂层形成在基板的一侧并收集表面颗粒;粘附到第一粘合剂层的剥离膜并在收集表面颗粒时与第一粘合剂层分离;在基板的另一侧形成的第二粘合剂层;和粘附到第二粘合剂层的保护膜,以保护基板并在其上具有渐变。根据本发明,存在效果,因为它可以容易且快速地通过收集涂覆粘合剂的基板的粘合层施加的表面污染洁净室污染的洁净室。粘附到要测量的物体,然后测量表面颗粒与肉眼或使用诸如光,放大镜,显微镜等的仪器的仪器的数量,尺寸,分布等。

著录项

  • 公开/公告号EP3211397B1

    专利类型

  • 公开/公告日2021-11-03

    原文格式PDF

  • 申请/专利权人

    申请/专利号EP20150853099

  • 发明设计人 KIM JIN HO;

    申请日2015-07-03

  • 分类号G01N15/02;G01N1/04;G01N1/20;

  • 国家 EP

  • 入库时间 2022-08-24 22:04:10

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