Electron beam generating source, electron beam irradiation apparatus, and X-ray irradiation apparatus

摘要

Problem to be solved: to provide an electron beam generating source capable of suppressing the axial displacement of the electron emission portion by appropriately applying the pressing force or tensile force of the tension holding portion to the electron emitting portion.The electron beam irradiation apparatus 1 has a filament 10 extending along an axis L and emitting electrons, a movable body 21 connected to one end of the filament 10, and a casing 22 for supporting the movable body 21 along the axis L movably A spring 23 for holding tension of the filament 10 is provided by applying tensile force to the movable body 21.The movable body 21 and the spring 23 are disposed on the axis L.Diagram