首页>
外国专利>
QUANTUM CASCADE LASER ELEMENT, QUANTUM CASCADE LASER DEVICE, AND METHOD FOR MANUFACTURING QUANTUM CASCADE LASER DEVICE
QUANTUM CASCADE LASER ELEMENT, QUANTUM CASCADE LASER DEVICE, AND METHOD FOR MANUFACTURING QUANTUM CASCADE LASER DEVICE
展开▼
机译:量子级联激光元件,量子级联激光装置和制造量子级联激光装置的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
This quantum cascade laser element comprises: a semiconductor substrate; a semiconductor laminate having a first end surface and a second end surface; a first electrode; a second electrode; and an antireflection film formed on the first end surface. The semiconductor laminate is configured to oscillate laser light having a central wavelength of at least 7.5 μm. The antireflection film includes: an insulating film which is a CeO2 film formed on the first end surface; a first refractive index film which is a YF3 film or a CeF3 film disposed on the reverse side of the insulating film from the first end surface; and a second refractive index film which is formed on the first refractive index film on the reverse side of the first refractive index film from the first end surface, and has a refractive index of greater than 1.8.
展开▼