Thin-film deposition pattern forming method, thin-film deposition pattern forming device, thin-film deposition mask with frame, and frame

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition pattern formation method that can form a high-definition vapor deposition pattern with good yield, and to provide a vapor deposition pattern formation device, a vapor deposition mask with a frame and a frame.SOLUTION: A vapor deposition pattern formation method includes: using a vapor deposition mask 10 provided with an opening part corresponding to a pattern to be produced with vapor deposition; bringing the vapor deposition mask 10 close contact with a vapor deposition object 20; and causing a vapor deposition material discharged from a vapor deposition source to adhere to the vapor deposition object 20 through the opening part of the vapor deposition mask 10. The vapor deposition pattern formation method brings the vapor deposition object 20 into an intentionally warped state in a predetermined direction when bringing the vapor deposition mask 10 close contact with a vapor deposition object 20.SELECTED DRAWING: Figure 1