Energy dispersive X-ray fluorescence spectrometer

摘要

To provide an energy dispersive fluorescence X-ray analyzer with which it is possible to accurately adjust a tube current flowing in an X-ray tube.SOLUTION: An energy dispersive fluorescence X-ray analyzer 1 comprises a power supply control unit 5 and a control unit 6. In the control unit 6, a monitor value is amplified with a first amplification rate by a first amplification unit 61, and a monitor value is also amplified with a second amplification rate larger than the first amplification rate by a second amplification unit 62. These monitor values are AD-converted by an AD converter 63. A control unit 65 determines the indicated value of a tube current flowing in an X-ray tube on the basis of these AD-converted monitor values. The power supply control unit 5 controls the operation of a power supply 4 on the basis of the indicated value and controls a tube current flowing in an X-ray tube 2. Therefore, it is possible for the control unit 6 to accurately determine the indicated value of the tube current. So, it is possible for the power supply control unit 5 to accurately control the tube current flowing in the X-ray tube 2 on the basis of the indicated value.SELECTED DRAWING: Figure 2