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DEPTH-MODULATED SLANTED GRATINGS USING GRAY-TONE LITHOGRAPHY AND SLANT ETCH
DEPTH-MODULATED SLANTED GRATINGS USING GRAY-TONE LITHOGRAPHY AND SLANT ETCH
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机译:使用灰度光刻和倾斜蚀刻深度调制的倾斜光栅
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摘要
An apparatus with a grating structure and a method for forming the same are disclosed. The grating structure includes forming a wedge-shaped structure in a grating layer using a grayscale resist and photo lithography. A plurality of channels is formed in the grating layer to define slanted grating structures therein. The wedge-shaped structure and the slanted grating structures are formed using a selective etch process.
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