Gas leak detector, gas leak detection setting method, gas leak detection method, program

摘要

PROBLEM TO BE SOLVED: To improve the reliability of gas leak detection. A gas leak detection device of the present invention includes a constant flow control valve, a pressure control valve, a supply side gas circuit, a master side gas circuit, a work side gas circuit, an isobaric valve, an exhaust valve, a test pressure sensor, and a differential pressure sensor. To be equipped with. The constant flow control valve controls the supply of a constant flow rate of gas. The pressurizing control valve controls the gas supply at the test pressure. The supply side gas circuit is connected to the constant flow rate control valve and the pressurization control valve. A master is connected to the gas circuit on the master side. A work is connected to the gas circuit on the work side. The isobaric valve opens and closes between the supply side gas circuit and the master side gas circuit, and opens and closes between the supply side gas circuit and the work side gas circuit. The exhaust valve opens and closes between the work side gas circuit and the outside. The test pressure sensor detects the pressure in the supply gas circuit. The differential pressure sensor detects the differential pressure between the gas circuit on the master side and the gas circuit on the work side. [Selection diagram] Fig. 2