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VERTICAL CONDUCTION ELECTRONIC POWER DEVICE HAVING A REDUCED ON RESISTANCE AND MANUFACTURING PROCESS THEREOF
VERTICAL CONDUCTION ELECTRONIC POWER DEVICE HAVING A REDUCED ON RESISTANCE AND MANUFACTURING PROCESS THEREOF
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机译:垂直传导电子功率器件,其电阻和制造工艺降低
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摘要
A vertical conduction electronic power device includes a body delimited by a first and a second surface and having an epitaxial layer of semiconductor material, and a substrate. The epitaxial layer is delimited by the first surface of the body and the substrate is delimited by the second surface of the body. The epitaxial layer houses at least a first and a second conduction region having a first type of doping and a plurality of insulated-gate regions, which extend within the epitaxial layer. The substrate has at least one silicide region, which extends starting from the second surface of the body towards the epitaxial layer.
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