METROLOGY QUALIFICATION OF NON-DESTRUCTIVE INSPECTION SYSTEMS

摘要

A method for performing metrology qualification of a non-destructive inspection (NDI) ultrasonic system includes performing, by the NDI ultrasonic system, an ultrasonic scanning operation on a calibration coupon. The ultrasonic scanning operation generates a scan signal. The method also includes superimposing a time-domain qualification mask on the scan signal and determining whether the scan signal is within the time-domain qualification mask. The method also includes validating a porosity sensitivity of the NDI ultrasonic system using a frequency-domain qualification mask. The method additionally includes qualifying the NDI ultrasonic system in response to the scan signal being within the time-domain qualification mask for a portion of the calibration coupon without a defect and the scan signal being above the time-domain qualification mask for another portion of the calibration coupon including the defect, and the porosity sensitivity of the NDI ultrasonic system being validated.