ABNORMALITY ANALYSIS DEVICE, ABNORMALITY ANALYSIS METHOD, AND MANUFACTURING SYSTEM

摘要

An abnormality analysis device including: an overall information obtainer that obtains overall information indicating an overall feature amount of a manufacturing system; an overall abnormal degree calculator that calculates an overall abnormal degree that is an abnormal degree of a whole of the manufacturing system by statistically processing the overall information; an individual information obtainer that obtains individual information indicating a feature amount of each of the plurality of constituent elements; an individual abnormal degree calculator that calculates an individual abnormal degree that is an abnormal degree of each of the plurality of constituent elements by statistically processing the individual information; and a determiner that determines whether or not the overall abnormal degree exceeds a threshold value, wherein the individual abnormal degree calculator calculates the individual abnormal degree when the determiner determines that the overall abnormal degree exceeds the threshold value.