VERTICAL CAVITY SURFACE-EMITTING LASER ELEMENT, VERTICAL CAVITY SURFACE-EMITTING LASER ELEMENT ARRAY, VERTICAL CAVITY SURFACE-EMITTING LASER MODULE, AND METHOD FOR MANUFACTURING VERTICAL CAVITY SURFACE-EMITTING LASER ELEMENT

摘要

[Problem] To provide: a vertical cavity surface-emitting laser element having a structure with which a pitch can be narrowed; a vertical cavity surface-emitting laser element array; a vertical cavity surface-emitting laser module; and a method for manufacturing a vertical cavity surface-emitting laser element. [Solution] This vertical cavity surface-emitting laser element comprises a first substrate and a second substrate. The first substrate is provided with: a semiconductor layer including an active layer; and a first distributed Bragg reflector (DBR) layer. The second substrate is provided with: a constriction layer having a constriction region and an implantation region with a greater conductivity than the constriction region; and a second DBR layer, wherein the constriction layer is bonded to the first substrate so as to be adjacent to the semiconductor layer.