Back-photoelectron spectroscopy measurement device, back-photoelectron spectroscopy measurement substrate, and back-photoelectron spectroscopy measurement method

摘要

PROBLEM TO BE SOLVED: To provide a high-sensitivity inverse photoemission spectrometry device for increasing signal strength, and to provide an inverse photoemission spectrometry board, and an inverse photoemission spectrometry.;SOLUTION: In an inverse photoemission spectrometry, a measurement target sample is disposed on a measurement board including a board, and a surface plasmon coupling member disposed on the board, electrons are applied to the measurement target sample, and light emission generated by the application of electrons is measured. The inverse photoemission spectrometry board includes: a board; and a surface plasmon coupling member disposed on the board. The inverse photoemission spectrometry device includes: a board; a measurement board that includes a surface plasmon coupling member disposed on the board, and disposes a measurement sample; an electron irradiation device for irradiating the measurement board with electrons; and a photo detector for measuring light radiated from the measurement sample on the measurement board.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT