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FREQUENCY SHIFTER FOR HETERODYNE INTERFEROMETRY MEASUREMENTS AND DEVICE FOR HETERODYNE INTERFEROMETRY MEASUREMENTS HAVING SUCH A FREQUENCY SHIFTER
FREQUENCY SHIFTER FOR HETERODYNE INTERFEROMETRY MEASUREMENTS AND DEVICE FOR HETERODYNE INTERFEROMETRY MEASUREMENTS HAVING SUCH A FREQUENCY SHIFTER
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机译:用于外差干涉测量测量的变频器和用于具有这种频率移位器的外差干涉测量测量的装置
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摘要
The invention refers to a frequency shifter for heterodyne interferometry measurements, comprising a chip, an input waveguide configured to guide a light beam, at least four phase modulators, each being arranged to receive the light beam from the input waveguide and configured to modulate a phase of the light beam, an output combiner being arranged to let the light beams modulated by each phase modulator interfere, a first output waveguide coupled to the output combiner and configured to receive the modulated light beams constructively interfering at the output combiner, a second output waveguide coupled to the output combiner and configured to receive the modulated light beams destructively interfering at the output combiner, wherein the input waveguide, the phase modulators, the output combiner, the first output waveguide and the second output waveguide are arranged on the chip.
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