Nitrogen removal equipment, nitrogen removal methods, nitrogen removal programs, and modeling equipment

摘要

PROBLEM TO BE SOLVED: To provide a nitrogen removing device, a nitrogen removing method, a nitrogen removing program, and a modeling device capable of imparting variety to the recovery of a nitrogen removing part. SOLUTION: A vacuum pump 75A is provided with a plurality of vacuum pumps 75A in which a nitrogen removing unit 70 for removing nitrogen from a taken-in gas and a plurality of recovery processes for recovering the nitrogen removing ability of the nitrogen removing unit 70 are provided as different processes. , 75B and heaters 74A, 74B, an acquisition unit 81 that acquires predetermined operation information of the modeling device, and a plurality of vacuum pumps provided as different processes based on the predetermined operation information of the modeling device acquired by the acquisition unit 81. It is provided with a control unit 80 that selects one of the recovery treatments of the nitrogen removing unit 70 by the 75A and 75B and the heaters 74A and 74B so that nitrogen is removed from the gas taken in by the nitrogen removing unit 70. [Selection diagram] Fig. 2