APPARATUS FOR ON-CHIP LABEL-FREE SENSORS BASED ON THE OPTICALLY ACTIVE RESONATORS INTEGRATED WITH MICROFLUIDIC CHANNELS AND METHOD OF MANUFACTURING THE SAME

摘要

An on-chip sensor device in which an optically active resonator and a microfluidic channel are combined and a method of manufacturing the same are provided. An optically active resonator according to an embodiment includes at least one silicon nitride disk plate; And a silicon nanocluster formed inside the silicon nitride disk plate, and photoluminescence (PL) can be emitted only by irradiating an upper pump beam through the absorption end face of the silicon nanocluster.