METHOD OF MANUFACTURING BRIDGE-TYPE STRUCTURE AND METHOD OF MANUFACTURING PIEZORESISTIVE ACCELERATION SENSOR HAVING BRIDGE-TYPE PIEZORESISTIVE BODY USING SAME METHOD

摘要

The present invention relates to a method of manufacturing a bridge-type structure and a method of manufacturing a piezoresistive acceleration sensor having a bridge-type piezoresistive body using same method. The present invention may: manufacture an accelerometer having the bridge-type piezoresistive body without high concentration boron ion doping by protecting the region where the bridge-shaped bridge portion is to be formed with an etch stop layer; remove restrictions on ion doping conditions and the thickness of the piezoresistive material required for accelerometer manufacturing; reduce the dangers of accelerometer manufacturing; and accurately manufacture the bridge portion in a predetermined size, thereby reducing product defect rates and improving precision.