Work surface defect detection device and detection method, work surface inspection system and program

摘要

PROBLEM TO BE SOLVED: To provide a surface defect detecting device or the like of a work capable of stably detecting a small surface defect with high accuracy. SOLUTION: A plurality of images of a part to be measured of a work are acquired in a state where a light / dark pattern by a lighting device is relatively moved with respect to a work which is a surface defect detection target, and binarization processing is performed for each image. By applying the threshold value and the threshold value, or by applying the corner detection function, the feature points of the image are extracted, the multidimensional feature amount is obtained for each feature point, and the temporary defect candidates are extracted. Of the plurality of images from which the temporary defect candidates have been extracted, if the image corresponding to the temporary defect candidate exists at or above a preset threshold value, the temporary defect candidate is determined as the defect candidate. A composite image is created by synthesizing a plurality of images including the determined defect candidates, and defect detection is performed based on the created composite image. [Selection diagram] FIG. 11