APPEARANCE INSPECTION DEVICE, APPEARANCE INSPECTION DEVICE CALIBRATION METHOD, AND PROGRAM

摘要

This appearance inspection device comprises an illumination means for emitting illumination light onto an object under inspection, a photography means for photographing the object under inspection and a calibration reference surface prepared for calibration, an inspection means for inspecting the object under inspection by processing an image photographed by the photography means, and an adjustment feature value calculation means for extracting prescribed feature values from a plurality of images of the calibration reference surface photographed by the photography means when the photography means and calibration reference surface were in different horizontal positional relationships and calculating a single adjustment feature value on the basis of the plurality of extracted feature values. The appearance inspection device uses the adjustment feature value to calibrate the illumination means and/or correct the photographed image.