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SEAMLESS GAPFILL WITH DIELECTRIC ALD FILMS
SEAMLESS GAPFILL WITH DIELECTRIC ALD FILMS
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机译:与介电ALD薄膜的无缝椎间椎间椎间椎间椎间飞机
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摘要
Methods for filling a substrate feature with a seamless dielectric gap fill are described. Methods comprise sequentially depositing a film with a seam, etching the film to form a recess, and depositing a second film in the recess to form a seamless gap fill.
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