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High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam
High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam
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机译:高分辨率太赫兹波浓度模块,散射光检测模块和使用太赫兹贝塞尔梁的高分辨率检测装置
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摘要
According to one embodiment of the present invention, a terahertz wave concentrating module can comprise: a first lens for changing a terahertz wave, which is emitted while a terahertz Bessel beam penetrates an object to be inspected, so as to have a small angle; and a second lens for concentrating, on a detector, the terahertz wave having passed through the first lens.
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