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GALLIUM ARSENIDE SINGLE CRYSTAL AND GALLIUM ARSENIDE SINGLE CRYSTAL SUBSTRATE
GALLIUM ARSENIDE SINGLE CRYSTAL AND GALLIUM ARSENIDE SINGLE CRYSTAL SUBSTRATE
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机译:砷化镓单晶和砷化镓单晶衬底
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摘要
A gallium arsenide single crystal including a straight body portion having a cylindrical shape, wherein a residual strain in a tangential direction in an outer circumferential portion is a compressive strain, the outer circumferential portion extending between an inner circumferential surface located 10 mm inward from an outer circumferential surface of the straight body portion toward a central axis and a location located 5 mm inward from the outer circumferential surface. There is a gallium arsenide single crystal substrate, wherein a residual strain in a tangential direction in an outer circumferential portion is a compressive strain, the outer circumferential portion extending between an inner circumference located 10 mm inward from an outer circumference toward a center and a location located 5 mm inward from the outer circumference.
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