where ds, ν and Es denote thickness, Poisson's ratio and Young's modulus of the substrate, R is the effective radius of curvature of the substrate with film. Topographic relief (or, in other words, local radii of curvature of the surface) is determined by the value of birefringence Δn and layer thickness dƒ. ;EFFECT: invention reduces time and complexity of monitoring defectiveness and mechanical stress and expands the range of measured parameters. ;1 cl, 1 tbl, 2 dwg"/>
公开/公告号RU2744821C1
专利类型
公开/公告日2021-03-16
原文格式PDF
申请/专利权人
申请/专利号RU20200121003
发明设计人 DEDKOVA ANNA ALEKSANDROVNA (RU);KIREEV VALERIJ YUREVICH (RU);BESPALOV VLADIMIR ALEKSANDROVICH (RU);PEREVERZEV ALEKSEJ LEONIDOVICH (RU);
申请日2020-06-25
分类号G01N21/21;G01B11/16;G01N21/88;
国家 RU
入库时间 2022-08-24 17:43:40