A method of decomposing a quartz sample, a method of analyzing metal contamination of a quartz sample, and a method of manufacturing a quartz member

摘要

It includes decomposing at least a part of the quartz sample by contacting a liquid in which at least a part of the quartz sample to be analyzed is immersed with gas generated from mixed acid, wherein the liquid is a liquid containing at least water, and the mixed acid is fluorinated. A method for decomposing a quartz sample is provided that is a mixed acid of hydrogen and sulfuric acid, and the molar fraction of sulfuric acid in the mixed acid is in the range of 0.07 to 0.40.