Laminated structure, semiconductor device and semiconductor system

摘要

SubjectThe purpose of this invention is to provide a stacked structure having a crystalline oxide film having a beta Gaia structure which is excellent in mobility and is thermally stable and suitable for semiconductor devices.SolutionA multilayer structure having a substrate and a crystalline oxide film having a. Beta. - galvanic structure, wherein the substrate is a single crystal substrate mainly composed of lithium tantalate, and the crystalline oxide film contains dopants and whose mobility is 30 cm. Sup. 2 / vs or more.Diagram