Laminated structure, semiconductor device, and manufacturing method of laminated structure

摘要

SubjectThe purpose of this invention is to provide an inexpensive stacked structure having a crystalline oxide film which is thermally stable and has excellent electrical properties.SolutionCrystalline substrateA multilayer structure having gallium oxide and a crystalline oxide film having a beta gas structureThe crystalline substrate is a tantalum crystal crystal substrateOn the principal surface of the lithium tantalate crystal substrateA crystalline oxide film containing. Beta. - Ga2O3 is mainly formed.The main surface of the lithium tantalate crystal substrate isAA laminated structure characterized by a m or R plane.Diagram