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Laminated structure, semiconductor device, and manufacturing method of laminated structure
Laminated structure, semiconductor device, and manufacturing method of laminated structure
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机译:层压结构,半导体器件和层压结构的制造方法
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摘要
SubjectThe purpose of this invention is to provide an inexpensive laminated structure having a crystalline oxide film which is thermally stable and has a smooth film surface and has a large carrier mobility.SolutionA layered structure having a crystalline substrate, and a crystalline oxide film having gallium and a beta alloy structure, wherein the crystalline substrate is a single crystal substrate mainly composed of lithium tantalate and has an off angle of 0.2 ° to 18.0 °.Diagram
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