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Method and apparatus for growing silicon single crystal

机译:用于种植硅单晶的方法和装置

摘要

Examples areA single crystal shoulder grows vertically (a) andAfter the vertical growthThe shoulder grows in the horizontal direction (b) andAfter the shoulder has grown in the horizontal directionThe (c) stage of the shoulder is growing downward andIncludingSaid shoulderBased on the shoulder diameter due to the final diameter of the shoulder and the above (b) and (c) stepsGrow at a given rateProblem to be solved: to provide a silicon single crystal growth method.Diagram
机译:实施例区域单晶肩部垂直增长(a)垂直生长肩部在水平方向上生长(b)肩部生长在肩部的水平方向上(c)阶段的肩部沿着肩部垂直肩部垂直肩部垂直肩部的最终直径和上述(b)和(c)在给定的速率问题上的步入待解决:提供硅单晶生长方法。目录

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