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Method and apparatus for growing silicon single crystal
Method and apparatus for growing silicon single crystal
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机译:用于种植硅单晶的方法和装置
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摘要
Examples areA single crystal shoulder grows vertically (a) andAfter the vertical growthThe shoulder grows in the horizontal direction (b) andAfter the shoulder has grown in the horizontal directionThe (c) stage of the shoulder is growing downward andIncludingSaid shoulderBased on the shoulder diameter due to the final diameter of the shoulder and the above (b) and (c) stepsGrow at a given rateProblem to be solved: to provide a silicon single crystal growth method.Diagram
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