Support structure of ultrasonic resonator and ultrasonic vibration processing equipment

摘要

PROBLEM TO BE SOLVED: To easily assemble and disassemble with a simple configuration, to have excellent productivity and maintainability, to enable stable operation regardless of the posture of an ultrasonic resonator, and to cause a deviation in processing position. Provided are a support structure of an ultrasonic resonator and an ultrasonic vibration processing apparatus having excellent durability and reliability capable of performing precision processing by preventing the swelling. SOLUTION: An ultrasonic resonator 16 in which first and second boosters 14 and 15 are coaxially fixed on both sides in an axial direction of an ultrasonic horn 13 to which a processing tool 12 is attached is attached to a holder 17. It is a support structure 10 of an ultrasonic resonator that rotatably supports both sides, and the holder 17 has an ultrasonic resonance with a rolling bearing mechanism 18 that rotatably supports the first booster 14 side of the ultrasonic resonator 16. It has a gas bearing mechanism 19 that rotatably supports the second booster 15 side of the body 16. [Selection diagram] Fig. 1