Optical scanning equipment, optical measuring equipment, and robots

摘要

PROBLEM TO BE SOLVED: To reduce the size of an optical scanning device. An optical scanning device has a light source unit having a light emitting portion from which light is emitted, and a mirror supported by the supporting portion, and the light emitting unit swings the mirror around a swinging axis. It has a scanning part that reflects the light emitted from the light source and a closed space partitioned by a plurality of wall parts including the first wall part and the second wall part, and the light emitting part and the scanning part are arranged in the closed space. A housing is provided, the first wall portion transmits the light reflected by the scanning unit, and the second wall portion includes a part of the light source unit. [Selection diagram] FIG. 9