Measurement of thin contamination layers on materials - is by determination of ratio of intensities from k and l shells in X:ray fluorescent radiation spectra

摘要

The surface to be examined is irradiated by X-rays and fluorescence radiation generated as a result is measured by formation of ratios of intensities of K and L radiation from the excited elements. The contamination layer and coating thickness are determined from these ratios. The device carrying out this procedure consists of a radioactive radiation source or an electron X-ray source (2), a specimen holder (3) and an energy dispersive detector (4). They are mounted in a vessel which can be evacuated, with energy discriminator (5) and electronic computer connected to it.