Arrangement with a atom - or. Molecular radiation source according to the principle of atomization solid materials

摘要

The gas discharge chamber (1) of the source of atomic beams or molecular beams serves to receive at least one target (2) and is connected via an extraction port (4) in a partition (5) to a substrate space (6) in which there is a substrate (3). The extraction port (4) is dimensioned and arranged in such a way that atomic beams and/or molecular beams originating from the target (2) enter from the chamber (1) into the substrate space (6). At the same time, transgression of the discharge from the chamber (1) into the substrate space (6) is suppressed thereby and a pressure difference between the chamber (1) and the substrate space (6) is maintained. The latter makes it possible to combine the advantages of cathodic sputtering with those of ion impact sputtering. The source can be produced inexpensively with small dimensions, is easy and reliable in handling and, above all, has a considerably enhanced productive capacity. The latter applies in particular with additional use of HF, a thermionic cathode, a deflection device for the removal of charged particles, a cooling device, and electric and/or magnetic fields. IMAGE