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Intelligent probe for fast microcircuit internal node testing
Intelligent probe for fast microcircuit internal node testing
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机译:用于快速微电路内部节点测试的智能探头
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摘要
57 Internal nodes of an integrated circuit chip are tested by applying a thinly focused electron beam to the node under control of a computer and then sensing secondary electron emission. The computer controls the application of test signals to the peripheral pad connections on the chip and intelligently selects a small number of nodes for testing which are the likeliest nodes to indicate circuit failure.
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